Main Articles Metal Adhesion to Si Substrates with Varying Surface Conditions

Metal Adhesion to Si Substrates with Varying Surface Conditions

Barbosa, Nicholas; Ridley, Rodney S.; Strate, Christopher H.; Dwyer, Robert S.; Grebs, Thomas; Vinci, Richard P.

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Date:

2001

Issue Volume:

695

DOI:

10.1557/proc-695-l7.9.1